Abstract: Silicon piezoresistive pressure sensors, due to their inherent high stability and high precision, are widely used in various industries. With their extensive application, various failure problems inevitably arise. Taking the common abnormal output fault mode of the sensor as an example, a systematic failure mechanism analysis of the sensor is conducted, and effective preventive and corrective measures are taken to reduce the occurrence probability. This provides a systematic analysis approach for sensor failure analysis and offers a reference for improving the reliability of the sensor during its usage process.