Design and Analysis of a Large-range Nano-positioning Platform Based on S-type Flexure Hinge

Aiming at the limitation of small travel in traditional flexible hinge nanopositioning platforms, this paper proposes an innovative composite hinge structure based on S-type flexible hinge and designs a one-dimensional large-range nano-positioning platform accordingly. The static and modal characteristics of two positioning platforms, namely the straight beam hinge and the S-type composite hinge, are compared and analyzed using the finite element method. The results indicate that the S-type hinge platform achieves a maximum stroke 2.5 times that of the flat hinge platform while maintaining a low driving force. Although the S-type hinge platform exhibits larger coupling errors, increasing the number of hinges on both sides of the moving platform effectively enhances system stiffness, reduces coupling errors, and improves dynamic performance. This design offers a new solution for large-range nano-positioning platforms and has broad application potential in precision manufacturing, biological sciences, and micro/nano-scale medical surgeries.